| 摘要 |
FIELD: physics.SUBSTANCE: invention relates to a ceramic conductor. In the disclosed method, a ceramic precursor film is deposited on a conductor substrate. The conductor substrate with the deposited ceramic precursor film is then heat treated. Heat treatment of the conductor substrate includes controlling temperature of the conductor substrate and/or oxygen partial pressure of the conductor substrate such that the ceramic precursor film is in a liquid state, and an epitaxial ceramic film forms from the liquid ceramic precursor film on the conductor substrate.EFFECT: fast production of a thick ceramic layer.21 cl, 13 dwg |
