| 摘要 |
PROBLEM TO BE SOLVED: To almost concentrically and circularly blow gas to an entire face of a conveyed article such as a printed circuit board and a semiconductor wafer by devising arrangement of a gas blow hole, and heat or cool the entire face of the conveyed article more uniformly.SOLUTION: In an upper and lower region on one side with a center portion orthogonal to a conveying direction in a cross-shaped region of a gas blowing opening plate as a reference, a second arranging pattern of a gas blowing hole is provided linear-symmetrical to a first arranging pattern of the gas blowing hole. In an upper and lower region on the other side in the cross-shaped region of the gas blowing opening plate, the first arranging pattern is provided linear-symmetrical to the second arranging pattern of the gas blowing hole, so that arranging patterns diagonally aligned in the cross-shaped region of the gas blowing opening plate are identical to each other. |
