| 发明名称 |
CONTAMINATION REDUCTION ELECTRODE FOR PARTICLE DETECTOR |
| 摘要 |
A charged particle detector arrangement is described. The detector arrangement includes a detection element and a collector electrode configured to collect charged particles released from the detection element upon impact of signal charged particles. |
| 申请公布号 |
US2014191127(A1) |
申请公布日期 |
2014.07.10 |
| 申请号 |
US201414204278 |
申请日期 |
2014.03.11 |
| 申请人 |
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik GmbH |
发明人 |
Lanio Stefan |
| 分类号 |
H01J37/244 |
主分类号 |
H01J37/244 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A charged particle detector arrangement, comprising:
a detection element configured to produce a charged particle signal; and a collector electrode configured to collect charged particles released from the detection element upon impact of signal charged particles. |
| 地址 |
Heimstetten DE |
