| 摘要 |
In one embodiment, a topography simulation apparatus includes a division module to divide a substance surface into plural computing elements, a determination module to extend straight lines in plural directions from each computing element, and to determine whether each straight line contacts the substance surface and determine which computing element each straight line contacts, and a calculation module to calculate, based on results of the determinations, a direct flux of a reactive species directly reaching each computing element, and a form factor indicating a positional relationship between the computing elements. When the determinations are performed to calculate the form factor in a case where an ionic species reaching each computing element is reflected, the determinations are performed by setting a cut-off angle for a reflection direction of the ionic species, and limiting the directions in which the straight lines are extended within a range of the cut-off angle. |
| 主权项 |
1. A topography simulation apparatus comprising:
a division module configured to divide a surface of a substance into a plurality of computing elements; a determination module configured to extend straight lines in a plurality of directions from each computing element, and configured to determine whether each straight line contacts the surface of the substance and determine which computing element each straight line contacts; and a calculation module configured to calculate, based on results of the determinations, a direct flux which is a flux of a reactive species directly reaching each computing element, and a form factor indicating a positional relationship between the computing elements, wherein when the determinations are performed to calculate the form factor in a case where an ionic species reaching each computing element is reflected, the determination module performs the determinations by setting a cut-off angle for a reflection direction of the ionic species, and limiting the directions in which the straight lines are extended within a range of the cut-off angle, and when a straight line from a first computing element among the plurality of computing elements contacts a second computing element, the determination module judges whether a straight line from the first computing element contacts a third computing element surrounding the second computing element, and judges whether the third computing element is positioned within the range of the cut-off angle of the first computing element, the determination module selecting, as the third computing element, a computing element directly adjacent to the second computing element, and a computing element indirectly adjacent to the second computing element through one or more computing elements each having positive results of the judgments, and repeating the judgments until there is no candidate for the third computing element to be selected. |
