| 摘要 |
<p>The present invention relates to an apparatus for preparing an improved high purity quartz glass powder to increase a reaction rate of a reaction gas and a quartz glass powder and enhance productivity. The present invention provides an apparatus for preparing a high purity quartz glass powder, comprising: a supply device for a raw material, which heats a quartz glass powder and supplies the quartz glass powder; a flow reaction tube for heating the quartz glass powder supplied from the supply device for a raw material and for floating and making the quartz glass powder react with a flowing gas and a reaction gas by receiving the flowing gas and the reaction gas from outside; a supply device for a flowing gas, which supplies the flowing gas to the flow reaction tube to allow the quartz glass powder in the flow reaction tube to flow; a supply device for a reaction gas, which supplies the reaction gas to the flow reaction tube to react with the quartz glass powder in the flow reaction tube; a heat source device for a flowing gas, which supplies the reaction gas to the flow reaction tube by pre-heating up to or above a certain temperature before the reaction gas is provided to the flow reaction tube; and a product collecting device installed at the upper part of the flow reaction tube, collecting a quartz glass powder with a reaction being conducted for a certain period of time among the quartz glass powders and emitting the collected quartz glass powder towards the outside.</p> |
