发明名称
摘要 A method is provided for tuning (i.e. modifying, changing) the impedance of semiconductor components or devices using a focused heating source. The method may be exploited for finely tuning the impedance of semiconductor components or devices, by modifying the dopant profile of a region of low dopant concentration (i.e. increasing the dopant concentration) by diffusion of dopants from adjacent regions of higher dopant concentration through the melting action of a focused heating source, for example a laser. The present invention is in particular directed to the use of lasers in relation to circuits for the creation of conductive links and pathways where none existed before. The present invention more particularly relates to a means wherein impedance modification (i.e. trimming or tuning) may advantageously be carried out as a function of the location of one or more conductive bridge(s) along the length of a gap region.
申请公布号 JP5544312(B2) 申请公布日期 2014.07.09
申请号 JP20110001541 申请日期 2011.01.06
申请人 发明人
分类号 H01L27/04;H01C17/26;H01L21/02;H01L21/268;H01L21/324;H01L21/329;H01L21/768;H01L21/822 主分类号 H01L27/04
代理机构 代理人
主权项
地址