MICRO-COLUMN WITH DOUBLE ALIGNER

摘要

The present invention relates to an ultra-small column with a double agliner and, more specifically, to an ultra-small column with a double agliner to compensate an original scanning path and an upper shaft when the original scanning path of a particle beam and the upper shaft out of a limiting aperture are separated; and to compensate efficiently the path of the particle beam by aligning the path of the particle beam to the aperture of the limiting aperture by the double agliners. As the present invention is configured to comprise the ultra-small column with a source lens, the source lens includes two aligner layers to compensate the path of the particle beam.