发明名称 SEMICONDUCTOR STRUCTURES AND METHODS OF FORMING THE SAME
摘要 A structure and method of forming the structure are disclosed. According to an embodiment, a structure includes three devices in respective three regions of a substrate. The first device comprises a first gate stack, and the first gate stack comprises a first dielectric layer. The second device comprises a second gate stack, and the second gate stack comprises a second dielectric layer. The third device comprises a third gate stack, and the third gate stack comprises a third dielectric layer. A thickness of the third dielectric layer is less than a thickness of the second dielectric layer, and the thickness of the second dielectric layer is less than a thickness of the first dielectric layer. A gate length of the third gate stack differs in amount from a gate length of the first gate stack and a gate length of the second gate stack.
申请公布号 KR20140086807(A) 申请公布日期 2014.07.08
申请号 KR20130102989 申请日期 2013.08.29
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 CHUANG HARRY HAK LAY;CHEN PO NIEN;YOUNG BAO RU
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
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