Inspection device

摘要

The present invention provides an inspection device including an imaging unit 16 for imaging an object to be inspected, a characteristics measurement unit 15 for measuring characteristics of the object to be inspected, an inspection information acquisition unit 11 for acquiring inspection information related to the object to be inspected, a condition determination unit 12 for determining measurement information related to a measurement condition of the object to be inspected corresponding to the inspection information, an imaging control unit 14 for controlling imaging by the imaging unit, and a measurement control unit 13 for controlling measurement by the characteristics measurement unit based on the measurement information.

主权项

1. An inspection device, comprising:
an imaging unit for imaging a specimen; an imaging control unit for dividing an imaging area for the specimen into a plurality of divided imaging areas, controlling the imaging unit to image each of the plurality of divided imaging areas so as to acquire an integrated image of the imaging area; a characteristics measurement unit for measuring spectral characteristics of the specimen; a measurement control unit for controlling the characteristics measurement unit to selectively execute measurements synchronically with the imaging executed by the imaging control unit; an inspection information acquisition unit for acquiring inspection information related to the specimen; a condition determination unit for determining measurement information related to a number of measurement spots acquired by the characteristics measurement unit for the divided imaging areas and imaging information related to a number of imaging spots acquired by the imaging unit, based on the inspection information; wherein the imaging control unit controls the imaging by the imaging unit based on the measurement information; and the measurement control unit controls the measurement by the characteristics measurement unit based on the measurement information.