| 摘要 |
The present invention relates to a deposition apparatus for an OLED device which is capable of preventing a light emitting layer from having a multilayer structure when the light emitting layer is formed through a scan deposition method using a plurality of deposition sources and a method thereof. A deposition apparatus of the present invention includes first to third deposition sources which include first to third deposition materials, respectively. The first to third deposition sources are disposed to overlap each other in a first direction while being spaced apart from each other in parallel in a second direction perpendicular to the first direction which is a scan direction of the substrate, such that the first to third deposition materials are simultaneously deposited on the substrate. First to third deposition areas, in which the first to third deposition sources simultaneously deposit the first to third deposition materials on the substrates, similarly overlap each other in the first direction. |
