发明名称 |
ETCHANT COMPOSITION FOR COPPER-CONTAINING METAL LAYER AND PREPARING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY USING SAME |
摘要 |
The invention relates to an etchant composition for copper-containing metal layer, more specifically, to a etchant composition for copper-containing metal layer, which has a remarkably improved stability by comprising hydrogen peroxide (H2O2), soluble compound having N-H bond and carboxyl group in a molecule, and diethylene triamine pentaacetic acid or salt thereof, and a manufacturing method of an array substrate for liquid crystal display using the same. |
申请公布号 |
KR20140086656(A) |
申请公布日期 |
2014.07.08 |
申请号 |
KR20120157397 |
申请日期 |
2012.12.28 |
申请人 |
DONGWOO FINE-CHEM CO., LTD. |
发明人 |
KWON, O BYOUNG;KIM, DONG KI;LEE, JI YEON |
分类号 |
C23F1/18;H05K3/06 |
主分类号 |
C23F1/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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