| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample fixing member for an Auger electron spectroscopic analyzer.SOLUTION: The sample fixing member for an Auger electron spectroscopic analyzer includes a fibrous columnar structure having a plurality of fibrous columnar objects. A solid sample can be stably fixed, ion etching can be prevented from causing the etching of the fixing member even if the ion etching is performed during analysis, hence deposition/intrusion of a foreign matter into the solid sample can be suppressed, and high analysis accuracy can be obtained. The fibrous columnar structure is a carbon nano-tube assembly having a plurality of carbon nano-tubes. |
