METHOD FOR MANUFACTURING METAL-OXIDE THIN FILM USING LOW TEMPERATURE PROCESS, THIN FILM, AND ELECTRIC DEVICE THEREOF

摘要

The present invention relates to an ultraviolet ray lamp device for sintering a metal-oxide thin film using a solution process. The present invention includes a sample mounting part and a housing which has a chamber space inside and is separated with a constant distance. The housing has a structure divided into two or more separation regions. An ultraviolet ray lamp for emitting ultraviolet rays downwards which faces the sample mounting part is formed in the upper part of the chamber space in one region. An inert gas injection part for injecting an inert gas into the one region is formed. The ultraviolet ray lamp is not installed in the other region. The sample mounting part can be moved while a sample is mounted on the sample mounting part.