| 摘要 |
The present invention relates to a shadow moire method with sine wave grating and a measuring apparatus using the same and, more specifically, to a shadow moire method with sine wave grating which is used to measure the surface flatness or the shape of a structure of an object to be measured and to a measuring apparatus using the same. Talbot effect which arises in the existing shadow moire method is removed, thereby increasing vertical measurement areas. Measurement resolution is also increased in the present invention using a phase shift method that prevents structural errors. |
