| 摘要 |
Disclosed are a tension-adjustment device which notifies the replacement time and the abrasion degree of a belt which receives the power of a driving motor, and an apparatus for polishing a wafer including the same. A tension-adjustment device according to an embodiment includes a tensioner which touches the belt and maintains the tension of the belt; a sensor which is connected to the tensioner and senses the position of the tensioner; and a control part which interlinks with the sensor, receives the signal of the sensor, and generates an alarm sound. The tensioner includes a receiving part which has an elastic body therein, a guide bar which is partly arranged in the receiving part, and a guide roller which is combined with one end of the guide bar and touches the belt. |
