MANUFACTURING METHOD OF SPACE TRANSFORMER FOR GLASS BASE PROBE CARD AND THE SPACE TRANSFORMER FOR GLASS BASE PROBE CARD THEREBY

摘要

The present invention relates to space transformer for a probe card. Subject matters of the present invention are a method of manufacturing a space transformer for a polymer-based probe card and the space transformer for a polymer-based probe card manufactured by the same. The method of manufacturing a space transformer for a probe card comprises the following steps. In a first step, a glass substrate is prepared. In a second step, a mask pattern layer for forming a via-hole is formed on the glass substrate. In a third step, a substrate via-hole is formed on the glass substrate according to a set pattern of the mask pattern layer. In a fourth step, a conductive material fills the via-hole. In a fifth step, a polymer substrate is formed on the glass substrate, and a metal interconnection electrode, which is electrically connected to the substrate via-hole, is formed on the polymer substrate. In a sixth step, a second polymer substrate is formed on top of the polymer substrate, on which the metal interconnection electrode is formed, and a polymer substrate via-hole, which is filled with the conductive material, is formed on the second polymer substrate. And in the seventh step, polymer substrates resulted from the fifth and sixth steps are alternately stacked, and the metal interconnection electrode formed on the polymer substrate is electrically connected with the polymer substrate via-hole. According to the present invention, a conventional multilayer ceramic simultaneous sintering process is not adopted, and deformation of the space transformer due to contractions and expansions is thus prevented. Furthermore, a manufacturing yield as well as productivity are improved and a manufacturing cost is reduced.