发明名称 |
DESIGNED ASPERITY CONTACTORS, INCLUDING NANOSPIKES, FOR SEMICONDUCTOR TEST, AND ASSOCIATED SYSTEMS AND METHODS |
摘要 |
Nano spike contactors suitable for semiconductor device test, and associated systems and methods are disclosed. A representative apparatus includes a translator having a wafer side positioned to face toward a device under test and an inquiry side facing away from the wafer side. A plurality of wafer-side sites are carried by the translator at the wafer side of the translator. The nanospikes can be attached to nanospike sites on a wafer side of a translator. Because of their small size, multiple nanospikes make contact with a single pad/solderball on the semiconductor device. In some embodiments, the nanospikes can be formed by sputtering over a metal carrier with a photoresist mask. In particular embodiments, the nanospikes have generally conical cross-section. |
申请公布号 |
WO2014105896(A1) |
申请公布日期 |
2014.07.03 |
申请号 |
WO2013US77680 |
申请日期 |
2013.12.24 |
申请人 |
ADVANCED INQUIRY SYSTEMS, INC. |
发明人 |
PRESTON, DOUGLAS, A.;JOHNSON, MORGAN, T. |
分类号 |
G01R31/26;G01R1/073 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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