发明名称 SIGNAL PATH OF A MULTIPLE-PATTERNED SEMICONDUCTOR DEVICE
摘要 A multiple-patterned semiconductor device is provided. The semiconductor device includes one or more layers with signal tracks defined by masks and a structure for transferring a signal between signal tracks and repowering the signal.
申请公布号 US2014184320(A1) 申请公布日期 2014.07.03
申请号 US201313732525 申请日期 2013.01.02
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 Allen David H.;Dewanz Douglas M.;Paulsen David P.;Sheets, II John E.
分类号 H01L23/535 主分类号 H01L23/535
代理机构 代理人
主权项 1. A semiconductor device, comprising: a signal conductor layer comprising: a first signal track having a design width on the signal conductor layer defined by a first mask and processed to a first physical width; a second signal track having the design width on the signal conductor layer defined by a second mask and processed to a second physical width, wherein the first signal track is adjacent to the second signal track and physical widths defined by a single mask track more closely than physical widths defined by separate masks; and a repeater structure to achieve a timing tolerance standard adapted to repower a first signal on a first conductor in the first signal track and transfer the first signal to a second conductor in the second signal track, and to repower a second signal on a third conductor in the second signal track and transfer the second signal to a fourth conductor in the first signal track.
地址 Armonk NY US
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