POLYCRYSTALLINE SILICON ROD AND METHOD FOR PRODUCING SAME

摘要

[Problem] The purpose of the present invention is to provide a polycrystalline silicon rod which is obtained by vapor deposition on a silicon core wire, and which is reduced in the oxygen concentration at the silicon core wire interface. [Solution] A polycrystalline silicon rod obtained by vapor deposition on a silicon core wire, wherein the oxygen concentration at the silicon core wire interface is 5-200 ppba.