发明名称 CLEANING QUALITY MANAGEMENT DEVICE AND CLEANING QUALITY MANAGEMENT METHOD USING ELECTROMAGNETIC FLOWMETER
摘要 The present invention provides a cleaning quality management device using an electromagnetic flow meter and a cleaning quality management method. An embodiment type of the present invention relates to the cleaning quality management device using the electromagnetic flow meter and the cleaning quality management method. The assignment of the present invention is to provide the cleaning quality management device using the electromagnetic flow meter which can automatically determine the cleaning quality regarding the completion of cleaning by measuring the electric conductivity of cleaning drainage consecutively. As a method for solving the assignment, an electromagnetic flow meter (2a) which measures a flow rate of the cleaning drainage by discharging the cleaning drainage more than a fixed quantity which can be measured, and a cleaning quality management device (2b) which automatically determines the cleaning quality regarding the completion of cleaning are included. The cleaning quality management device (2b) comprises; an S/N ratio measuring unit (2b1) which measures an S/N ratio of a detection signal of the electromagnetic flow meter (2a); an S/N ratio electric conductivity determination table which obtains an output of the S/N ratio measuring unit corresponding to the electric conductivity of the cleaning drainage using the cleaning drainage of a predetermined electric conductivity; and a cleaning completion determining unit (2b2) which outputs the cleaning completion when the output gets lower below the predetermined electric conductivity. The cleaning completion determining unit determines the completion of cleaning from a value of the S/N ratio of the detection signal and the quality of the cleaning drainage.
申请公布号 KR20140082911(A) 申请公布日期 2014.07.03
申请号 KR20130009076 申请日期 2013.01.28
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 IIJIMA TAKUYA
分类号 H01L21/302;H01L21/66 主分类号 H01L21/302
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