| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a vapor deposition apparatus capable of efficiently processing a deposition process and easily improving characteristics of a deposition layer, and a method of manufacturing an organic light-emitting display apparatus.SOLUTION: This invention provides a vapor deposition apparatus for forming a deposition layer on a substrate, the vapor deposition apparatus including a supply unit configured to supply a first source gas, a reaction space connected to the supply unit, a plasma generator in the reaction space, a first injection unit configured to inject a deposition source material including the first source gas to the substrate, and a filament unit in the reaction space, the filament unit being connected to a power source.</p> |
