| 发明名称 |
Apparatus and Method of Inspecting a Defect of an Object |
| 摘要 |
An apparatus for detecting a defect of an object may include a light emitter configured to emit straight polarized lights having different polarized directions, a spatial filter having openings through which the straight polarized lights selectively pass, an optical member configured to condense the straight polarized lights, which pass through the openings, on the object, and a light detector configured to detect lights reflected from the object. Thus, the defect may be accurately detected in a short time. |
| 申请公布号 |
US2014185044(A1) |
申请公布日期 |
2014.07.03 |
| 申请号 |
US201314142093 |
申请日期 |
2013.12.27 |
| 申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
Ishikawa Akio;Togashi Mitsuhiro;Numata Mitsunori |
| 分类号 |
G01N21/88 |
主分类号 |
G01N21/88 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus for detecting a defect of an object, the apparatus comprising:
a light emitter configured to emit polarized beams of light having different polarized directions; a spatial filter having openings through which the polarized beams of light selectively pass; an optical member configured to condense the polarized beams of light and to project the beams of light onto the object; and a light detector configured to detect light reflected from the object. |
| 地址 |
Suwon-si KR |
