| 摘要 |
A temperature control device (3) is provided with a circulating cooling/heating unit (5) that cools and heats a circulating fluid and circulates said circulating fluid to and from a chamber, a control unit (6) that keeps the temperature of the chamber at a target temperature by regulating the temperature of the circulating fluid, and a housing (7) that contains the circulating cooling/heating unit (5) and the control unit (6). A circulation chamber (46) for the circulating cooling/heating unit (5) and a control chamber (47) for the control unit (6) are provided in the same plane within the housing (7). A tank (10) that stores the circulating fluid, a pump (20) that circulates the circulating fluid, a heat exchanger (14) that cools the circulating fluid, and a heating means (17) that heats the circulating fluid are laid out inside the circulation chamber (46). An inverter (31) that controls the pump (20) and an SSR (30) that turns the heating means (17) on and off are laid out inside the control chamber (47). |
