发明名称 |
OPTICAL METHOD AND SYSTEM FOR CRITICAL DIMENSIONS AND THICKNESS CHARACTERIZATION |
摘要 |
<p>Method and system for measuring one or more parameters of a patterned structure, using light source producing an input beam of at least partially coherent light in spatial and temporal domains, a detection system comprising a position sensitive detector for receiving light and generating measured data indicative thereof, an optical system configured for focusing the input light beam onto a diffraction limited spot on a sample's surface, collecting an output light returned from the illuminated spot, and imaging the collected output light onto a light sensitive surface of the position sensitive detector, where an image being indicative of coherent summation of output light portions propagating from the structure in different directions.</p> |
申请公布号 |
WO2014102792(A1) |
申请公布日期 |
2014.07.03 |
申请号 |
WO2013IL51075 |
申请日期 |
2013.12.26 |
申请人 |
NOVA MEASURING INSTRUMENTS LTD. |
发明人 |
SHAFIR, DROR;BARAK, GILAD;WOLFING, SHAY |
分类号 |
G01B9/00;G01B11/25;G01J3/42;G01J3/447;G01J3/45;G01J4/00;G01N21/00;G02B21/00 |
主分类号 |
G01B9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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