发明名称 |
THIN FILM SILICON NITRIDE BARRIER LAYERS ON FLEXIBLE SUBSTRATE |
摘要 |
<p>An article comprising a polymeric substrate and at least one inorganic barrier layer, wherein the inorganic barrier layer has a stress not greater than about 400 MPa and a density of at least about 1.5 g/cm3. The article is preferably an optical device, such as an organic light emitting diode (OLED) or a photovoltaic (PV) module, wherein a silicon nitride barrier layer has been directly deposited on a flexible polymeric substrate via plasma enhanced chemical vapor deposition (PECVD).</p> |
申请公布号 |
WO2014105734(A1) |
申请公布日期 |
2014.07.03 |
申请号 |
WO2013US77104 |
申请日期 |
2013.12.20 |
申请人 |
SAINT-GOBAIN PERFORMANCE PLASTICS CORPORATION |
发明人 |
DHAR, ANIRBAN;GIASSI, ALESSANDRO |
分类号 |
H01L21/033 |
主分类号 |
H01L21/033 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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