| 摘要 |
PROBLEM TO BE SOLVED: To provide a working apparatus capable of detecting reduction in an amount of suction performed by a fan regardless of the cause of abnormality.SOLUTION: The working apparatus includes: a chuck table for holding a workpiece; working means for applying working to the workpiece held by the chuck table; a working chamber for surrounding the chuck table and the working means; and an exhaust passage which has one end communicated with a communication hole of the working chamber, and the other end connected to the fan and which exhausts an atmosphere in the working chamber. The working apparatus further includes a differential pressure gauge for detecting differential pressure between the atmosphere in the working chamber and the atmosphere outside of the working apparatus, and detects the abnormality of the exhaust passage including the communication hole and the fan, by detecting reduction in the suction amount in the working chamber, when the differential pressure between the atmosphere in the working chamber detected by the differential pressure gauge and the atmosphere outside of the working apparatus is less than a predetermined value. |
