摘要 |
<p>The present invention provides a measurement apparatus for measuring a shape of an object to be measured, comprising a measuring head (1) configured to perform measurement in a first measurement mode and perform measurement in a second measurement mode having measurement accuracy higher than that of the first measurement mode, and a control unit (20) configured to control the measuring head, wherein in the first measurement mode, the control unit moves the measuring head outside an occupancy region within which the object to be measured should fall while the object to be measured falls within the occupancy region, and in the second measurement mode, the control unit moves, the measuring head to satisfy an allowable condition in the second measurement mode based on a measurement result in the first measurement mode.</p> |