发明名称 Measurement apparatus and measurement method
摘要 <p>The present invention provides a measurement apparatus for measuring a shape of an object to be measured, comprising a measuring head (1) configured to perform measurement in a first measurement mode and perform measurement in a second measurement mode having measurement accuracy higher than that of the first measurement mode, and a control unit (20) configured to control the measuring head, wherein in the first measurement mode, the control unit moves the measuring head outside an occupancy region within which the object to be measured should fall while the object to be measured falls within the occupancy region, and in the second measurement mode, the control unit moves, the measuring head to satisfy an allowable condition in the second measurement mode based on a measurement result in the first measurement mode.</p>
申请公布号 EP2749840(A1) 申请公布日期 2014.07.02
申请号 EP20130199527 申请日期 2013.12.24
申请人 CANON KABUSHIKI KAISHA 发明人 NISHIKAWA, YUYA;KURAMOTO, YOSHIYUKI;NAKAUCHI, AKIHIRO
分类号 G01B21/20;G01B5/20;G01B11/24 主分类号 G01B21/20
代理机构 代理人
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