METHOD FOR PRODUCING CHLOROPOLYSILANE, AND FLUID BED REACTION DEVICE

摘要

Disclosed is a method for producing chloropolysilane by which the yield of a fluid reaction to produce the chloropolysilane is improved while blockage in a reactor caused by attachment of higher-order silicon chloride as a by-product is prevented. In producing the chloropolysilane by reacting fluidized silicon particles or silicon alloy particles with a chlorine gas, an outlet filter 22 is provided, upstream from a product outlet 20 that releases a reaction product, above the area in which the silicon particles or silicon alloy particles are fluidized inside a reaction tank 12. The outlet filter 22 prevents fine particles blown up by fluidization from flowing out of the reaction tank 12 through the product outlet 20. A temperature of the outlet filter 22 is set in a range of 210 to 350°C.