| 摘要 |
PURPOSE: A substrate processing equipment is provided to reduce assembly and settling time in a maintenance process of a chamber by separating a top lead and a lower lead. CONSTITUTION: A chamber body(200) has an opening part on the top. The lower lead(310) is arranged to the chamber body in order to be detachable. The lower lead has the reaction space communicated with the opening. An upper lead(320) is arranged to the lower lead in order to be detachable. The upper lead shields the upper part of the lower lead and seals the reaction space and the opening. A separation unit(3000) is fixed one among the chamber body and lower lead and opens/closes the upper lead. |
