发明名称 |
METHOD FOR PRODUCING HIGH-PERFORMING AND ELECTRICALLY STABLE SEMI-CONDUCTIVE METAL OXIDE LAYERS, LAYERS PRODUCED ACCORDING TO THE METHOD AND USE THEREOF |
摘要 |
<p>The present invention relates to a method for producing a semi-conductor laminate comprising a first and a second metal oxide layer as well as a dielectric layer, wherein the first metal oxide layer is arranged between the second metal oxide layer and the dielectric layer. The first and second metal oxide layers are formed accordingly from a first and a second liquid phase. The present invention also relates to a semi-conductor laminate that can be obtained from such a method, and to electronic components comprising such a semi-conductor laminate.</p> |
申请公布号 |
EP2748857(A1) |
申请公布日期 |
2014.07.02 |
申请号 |
EP20120758475 |
申请日期 |
2012.09.12 |
申请人 |
EVONIK DEGUSSA GMBH |
发明人 |
STEIGER, JÜRGEN;PHAM, DUY VU;NEUMANN, ANITA;MERKULOV, ALEXEY;HOPPE, ARNE |
分类号 |
H01L29/786 |
主分类号 |
H01L29/786 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|