| 摘要 |
PROBLEM TO BE SOLVED: To provide a ring-shaped shield member capable of preventing occurrence of a gap between a component of the ring-shaped shield member and a substrate placement stage, and also preventing breakage of the component. SOLUTION: A shield ring 15 comprises four ring components 41-44. An omnidirectional movement regulating part 45 is provided to a fixed end in a length direction of the ring components 41-44. A unidirectional movement tolerable part 46 is provided away from the omnidirectional movement regulating part 45. For example, the ring components 41-44 are combined such that an end surface of a fixed end 41a of one ring component 41 abuts with a side surface of a free end 43b of an adjoining other ring component 43, and one side surface of a free end 41b of one ring component 41 abuts with an end surface of a fixed end 44a of an adjoining other ring component 44. COPYRIGHT: (C)2013,JPO&INPIT |
