发明名称 |
Pressure sensor |
摘要 |
<p>A pressure sensor has a Si device (130) having a first main surface (130a) that has a bonded area, a second main surface parallel to the first main surface, a pressure-sensitive resistor (131) formed on the first main surface, and a joining assist pattern formed on the first main surface, and a pressing member bonded to the bonded area on the first main surface and compressing the Si device in a thickness direction. The pressure-sensitive resistor has a first bonded section which is placed within the bonded area of the first main surface and is bonded to the pressing member. The joining assist pattern has a second bonded section which is made of the same material as the first bonded section of the pressure-sensitive resistor and is placed within the bonded area of the first main surface and is bonded to the pressing member.</p> |
申请公布号 |
EP2749859(A1) |
申请公布日期 |
2014.07.02 |
申请号 |
EP20140161347 |
申请日期 |
2009.09.30 |
申请人 |
NGK SPARK PLUG CO., LTD. |
发明人 |
MORI, TAKASHI;MIZUNO, TAKUYA;MATSUOKA, TOSHIYUKI;TSUJIMURA, YOSHINORI;KOJIMA, TAKIO;HIGUCHI, YUZO |
分类号 |
G01L23/18;G01L19/14;G01L23/22 |
主分类号 |
G01L23/18 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|