发明名称 Pressure sensor
摘要 <p>A pressure sensor has a Si device (130) having a first main surface (130a) that has a bonded area, a second main surface parallel to the first main surface, a pressure-sensitive resistor (131) formed on the first main surface, and a joining assist pattern formed on the first main surface, and a pressing member bonded to the bonded area on the first main surface and compressing the Si device in a thickness direction. The pressure-sensitive resistor has a first bonded section which is placed within the bonded area of the first main surface and is bonded to the pressing member. The joining assist pattern has a second bonded section which is made of the same material as the first bonded section of the pressure-sensitive resistor and is placed within the bonded area of the first main surface and is bonded to the pressing member.</p>
申请公布号 EP2749859(A1) 申请公布日期 2014.07.02
申请号 EP20140161347 申请日期 2009.09.30
申请人 NGK SPARK PLUG CO., LTD. 发明人 MORI, TAKASHI;MIZUNO, TAKUYA;MATSUOKA, TOSHIYUKI;TSUJIMURA, YOSHINORI;KOJIMA, TAKIO;HIGUCHI, YUZO
分类号 G01L23/18;G01L19/14;G01L23/22 主分类号 G01L23/18
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