| 发明名称 | Area-efficient capacitor using carbon nanotubes | ||
| 摘要 | An on-chip decoupling capacitor is disclosed. One or more carbon nanotubes are coupled to a first electrode of the capacitor. A dielectric skin is formed on the one or more carbon nanotubes. A metal coating is formed on the dielectric skin. The dielectric skin is configured to electrically isolate the one or more carbon nanotubes from the metal coating. | ||
| 申请公布号 | US8766345(B2) | 申请公布日期 | 2014.07.01 |
| 申请号 | US201213690593 | 申请日期 | 2012.11.30 |
| 申请人 | International Business Machines Corporation | 发明人 | Farmer Damon B.;Franklin Aaron D.;Han Shu-Jen;Tulevski George S. |
| 分类号 | H01L27/108;H01L29/76;H01L29/94;H01L31/119 | 主分类号 | H01L27/108 |
| 代理机构 | Cantor Colburn LLP | 代理人 | Cantor Colburn LLP ;Alexanian Vazken |
| 主权项 | 1. An on-chip decoupling capacitor, comprising: one or more carbon nanotubes coupled to a first electrode, wherein the first electrode is configured to include at least on trench; a dielectric skin formed on the one or more carbon nanotubes; a metal coating formed on the dielectric skin, wherein the dielectric skin is configured to electrically isolate the one or more carbon nanotubes from the metal coating; and a second electrode forming at least one prong that is configured to extend into the at least one trench of the first electrode. | ||
| 地址 | Armonk NY US | ||