发明名称 |
OXIDE THIN-FILM TRANSISTOR COMPRISING SELF-ASSEMBLY MONOLAYER AND METHOD FOR PREPARATION THEREOF |
摘要 |
<p>The present invention relates to an oxide thin-film transistor comprising a self-assembly molecular film and a preparation method thereof. The thin-film transistor according to the present invention including a gate electrode, a gate insulating film, a semiconductor film, and source/drain electrodes on a substrate can increase the mobility and reduce a threshold voltage by including the self-assembly molecular film on the gate insulating film.</p> |
申请公布号 |
KR20140081249(A) |
申请公布日期 |
2014.07.01 |
申请号 |
KR20120150803 |
申请日期 |
2012.12.21 |
申请人 |
SAMSUNG FINE CHEMICALS CO., LTD. |
发明人 |
LEE, TAE GWEON;KIM, SANG BOK;PARK, EUN YU;MOON, YONG SIK |
分类号 |
H01L29/786;H01L21/336 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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