发明名称 OXIDE THIN-FILM TRANSISTOR COMPRISING SELF-ASSEMBLY MONOLAYER AND METHOD FOR PREPARATION THEREOF
摘要 <p>The present invention relates to an oxide thin-film transistor comprising a self-assembly molecular film and a preparation method thereof. The thin-film transistor according to the present invention including a gate electrode, a gate insulating film, a semiconductor film, and source/drain electrodes on a substrate can increase the mobility and reduce a threshold voltage by including the self-assembly molecular film on the gate insulating film.</p>
申请公布号 KR20140081249(A) 申请公布日期 2014.07.01
申请号 KR20120150803 申请日期 2012.12.21
申请人 SAMSUNG FINE CHEMICALS CO., LTD. 发明人 LEE, TAE GWEON;KIM, SANG BOK;PARK, EUN YU;MOON, YONG SIK
分类号 H01L29/786;H01L21/336 主分类号 H01L29/786
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