| 发明名称 | Production method of microlens | ||
| 摘要 | A production method of a solid-state imaging device in which microlenses are arranged adjacent to each other on a substrate, includes: a first process of forming first microlenses on a surface of the substrate leaving space therebetween for providing second microlenses; and a second process of applying an overcoating material onto the surface of the substrate on which the first microlenses are formed, drying the overcoating material, exposing the overcoating material to light using a gray scale mask, and developing the exposed overcoating material, so as to form second microlenses in the space between the first microlenses adjacent to each other. | ||
| 申请公布号 | US8766158(B2) | 申请公布日期 | 2014.07.01 |
| 申请号 | US201113574897 | 申请日期 | 2011.01.20 |
| 申请人 | Nissan Chemical Industries, Ltd. | 发明人 | Arase Shinya;Sakaguchi Takahiro |
| 分类号 | H01L27/00;H01J3/14;G03F1/00;G02B23/24 | 主分类号 | H01L27/00 |
| 代理机构 | Oliff PLC | 代理人 | Oliff PLC |
| 主权项 | 1. A production method of a solid-state imaging device in which microlenses are arranged adjacent to each other on a substrate, the method comprising: a first process of forming first microlenses on a surface of the substrate leaving space therebetween for providing second microlenses; and a second process of applying an overcoating material onto the surface of the substrate on which the first microlenses are formed, drying the overcoating material, exposing the overcoating material to light using a gray scale mask, and developing the exposed overcoating material, so as to form second microlenses in the space between the first microlenses adjacent to each other. | ||
| 地址 | Tokyo JP | ||