Variable energy charged particle systems

摘要

Charged particle system are disclosed and include a first voltage source, a second voltage source electrically isolated from the first voltage source, a charged particle source electrically connected to the first voltage source, and an extractor electrically connected to the second voltage source. Methods relating to the charged particle systems are also disclosed.

主权项

1. A gas field ion system, comprising:
a first voltage source connected to and referenced to an electrical ground; a second voltage source connected to and referenced to the electrical ground, a voltage output of the second voltage source being independent of a voltage output of the first voltage source; a gas field ion source comprising a tip having a tip apex, the gas field ion source being electrically connected to the first voltage source so that the first voltage source is configured to apply a first voltage to the gas field ion source relative to the electrical ground; and an extractor electrically connected to the second voltage source so that the second voltage source is configured to apply a second voltage to the extractor relative to the electrical ground, wherein, during use of the gas field ion system, the second voltage is always negative relative to the electrical ground.