发明名称 Calixarene compound and photoresist composition comprising same
摘要 A molecular glass compound includes (A) a tetrameric reaction product of a specific aromatic compound having at least one hydroxy group, and a specific polycyclic or fused polycyclic aromatic aldehyde; and (B) an acid-removable protecting group as an adduct with the hydroxy group of the aromatic compound and/or a hydroxy group of the polycyclic or fused polycyclic aromatic aldehyde. A photoresist composition including the molecular glass compound, and a coated substrate including a layer of the photoresist composition are also disclosed.
申请公布号 US8765356(B2) 申请公布日期 2014.07.01
申请号 US201213624597 申请日期 2012.09.21
申请人 Dow Global Technologies LLC;Rohm and Haas Electronics Materials LLC 发明人 Green D. Patrick;Jain Vipul;Bailey Brad C.
分类号 G03F7/004;G03F7/039;C07C41/00 主分类号 G03F7/004
代理机构 Cantor Colburn LLP 代理人 Cantor Colburn LLP
主权项 1. A molecular glass compound comprising: A.) a tetrameric reaction product of: an aromatic compound of formula (I): C6R1x(OR2)y  (I) wherein R1 is H, F, C1-20 alkyl, C1-20 haloalkyl, C6-20 aryl, C6-20 haloaryl, C7-20 aralkyl, or C7-20 haloaralkyl, R2 is H, C1-20 alkyl, C1-20 haloalkyl, x is 6-y and y is 2 or 3, at least one OR2 group is a hydroxy group, and at least two OR2 groups are meta to one another, and a polycyclic or fused polycyclic aromatic aldehyde of formula (II) Ar1—CHO  (II) wherein Ar1 is a substituted, halosubstituted or unsubstituted C4-20 heterocyclic aromatic-containing moiety, or a substituted, halosubstituted or unsubstituted C8-20 fused polycylic aromatic moiety, and B.) an acid-removable protecting group as an adduct with the hydroxy group of the aromatic compound, a hydroxy group of the polycyclic or fused polycyclic aromatic aldehyde, or a combination comprising at least one of the foregoing; wherein the acid-removable protecting group is the adduct of an aromatic vinyl ether represented by formula (VI) C(R9)2═C(R10)—O-(L)n-R11  (VI) wherein R9 and R10 are each independently a single bond, H, C1-20 alkyl, C1-20 haloalkyl, C6-20 aryl, C6-20 haloaryl, C7-20 aralkyl, or C7-20 haloaralkyl, L is a C1-20 linking group, n is 0 or 1, and R11 is a substituted or unsubstituted, monocyclic, polycyclic or fused polycyclic C1-20 aliphatic group or C6-20 aromatic-containing group, wherein R9 and R10 are connected to R11 when either or both of R9 and R10 is a single bond and n is 0.
地址 Midland MI US