VACUUM DEGAS CHAMBER AND CASSETTE WITH UNIFORM TEMPERATURE DISTRIBUTION

摘要

Disclosed are a vacuum degas chamber and a cassette having uniform temperature distribution. The cassette includes a top frame and a bottom frame which are separately arranged in a vertical direction; guide frames which are arranged to face each other between both end parts of the top frame and the bottom frame and in which multiple guide slots guiding the outer circumference of a substrate are separately arranged corresponding to each other; and a docking pipe installed on the bottom center of the bottom frame to be docked on a cassette holder and receiving heat from the cassette holder. Therefore, the cassette has an effect of improving the uniformity of the inner temperature of the cassette by conducting the heat to the cassette itself as a heat block is installed on the cassette holder.