PRE SPACE TRANSFORMER AND SPACE TRANSFORMER MANUFACTURED BY THE PRE SPACE TRANSFORMER, AND APPARATUS FOR INSPECTING SEMICONDUCTOR DEVICE WITH THE SPACE TRANSFORMER

摘要

The present invention relates to a preliminary space transformer. The preliminary space transformer according to an embodiment of the present invention includes a substrate with one surface and the other surface which is opposite to the one surface; and signal electrodes, power electrodes, and ground electrodes on the one surface. The signal electrodes, the power electrodes, and the ground electrodes are repeatedly arranged while forming a unit pattern.