APPARATUS FOR COLLECTING POWDER AND SYSTEM THEREOF

摘要

The present invention relates to an apparatus for collecting powder for a semiconductor process and a power processing system using the same. The power processing system for a semiconductor process according to one embodiment of the present invention includes a powder collection device (100); a dry pump (200); a remover (300); a scriber (400); and a storage tank (310). According to the embodiment of the present invention, the powder collection device (100) includes a powder housing (130).