PARTICLE BEAM IMAGE ACQUISITION APPARATUS AND METHOD FOR ACQUISITION THE SAME

摘要

The present invention relates to a particle beam emission image acquisition apparatus which comprises a microchannel plate for receiving a particle beam emitted from a particle beam source and emitting a secondary electron; a fluorescent screen for receiving the secondary electron generated in the microchannel plate and converting the same into an optical signal; an image acquisition device for acquiring optical data emitted from the fluorescent screen; and an image process device for comprising a slow frequency pass filter of a spatial region and treating and imaging data obtained from the image acquisition device, and to a method for acquiring a particle beam emission image using the same.