发明名称 ELECTRODE FOR USE IN DISPLAY DEVICE OR INPUT DEVICE, AND SPUTTERING TARGET FOR ELECTRODE FORMATION
摘要 <p>PROBLEM TO BE SOLVED: To provide an electrode for use in a display device or an input device having characteristics of excellent wiring resistance and reflectance, while having excellent adhesion.SOLUTION: An electrode for use in a display device or an input device consists of a lamination film including a first layer composed of an Al alloy formed on the substrate side, a second layer formed thereabove and composed of (a) at least one kind selected from a group consisting of Mo, a Mo alloy, Ti, a Ti alloy, Ta, W, and Nb, and/or (b) an In oxide and/or a conductive oxide including a Zn oxide, and a third layer formed above the second layer and composed of an Ag alloy. The electrode has a thickness of 100-800 nm, the second layer has a thickness of 3-50 nm, the third layer has a thickness of 60-480 nm, and the thickness ratio of the third layer occupying the thickness of the electrode is 10-70%.</p>
申请公布号 JP2014120487(A) 申请公布日期 2014.06.30
申请号 JP20120271803 申请日期 2012.12.12
申请人 KOBELCO KAKEN:KK;KOBE STEEL LTD 发明人 OKUNO HIROYUKI;NAKAI JUNICHI;GOTO YASUSHI;TAUCHI HIRONORI;IWANARI YUMI;SHIDA YOKO
分类号 H01L21/28;C23C14/34;G02F1/1343;G02F1/1368;G09F9/30;H01L21/285;H01L27/32;H01L29/786;H01L51/50;H05B33/14;H05B33/26 主分类号 H01L21/28
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