发明名称 |
ELECTRONIC ELEMENT, VARIABLE CAPACITOR, MICRO SWITCH, METHOD FOR DRIVING MICRO SWITCH, MEMS TYPE ELECTRONIC ELEMENT, MICRO ACTUATOR AND MEMS OPTICAL ELEMENT |
摘要 |
Driving is made possible in a moving range equivalent to or wider than the conventional range, with a driving voltage having a range smaller than a pull-in voltage. An electronic element includes a fixed portion provided with a first driving electrode and a first signal electrode, and a movable portion provided with a second driving electrode and a second signal electrode, movable with respect to the fixed portion and provided to generate a spring force to make restoration to a predetermined position. An electrostatic force is generated between the first and second driving electrodes by a voltage applied therebetween so that the electrostatic force resists against the spring force; and the first and second driving electrodes and the first and second signal electrodes are arranged so that the electrostatic force is generated in a direction in which a spacing distance between the first and second signal electrodes is widened. |
申请公布号 |
KR20140079834(A) |
申请公布日期 |
2014.06.27 |
申请号 |
KR20147013071 |
申请日期 |
2007.09.27 |
申请人 |
NIKON CORPORATION |
发明人 |
KONISHI HIROSHI;SUZUKI JUNJI |
分类号 |
H01G5/16;G02B26/08;H01L21/822;H01L27/04 |
主分类号 |
H01G5/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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