发明名称 METHODS OF PROCESSING UNITS COMPRISING CRYSTALLINE MATERIALS, AND METHODS OF FORMING SEMICONDUCTOR-ON INSULATOR CONSTRUCTIONS
摘要 <p>Some embodiments include methods of processing a unit containing crystalline material. A damage region may be formed within the crystalline material, and a portion of the unit may be above the damage region. A chuck may be used to bend the unit and thereby induce cleavage along the damage region to form a structure from the portion of the unit above the damage region. Some embodiments include methods of forming semiconductor-on-insulator constructions. A unit may be formed to have dielectric material over monocrystalline semiconductor material. A damage region may be formed within the monocrystalline semiconductor material, and a portion of the monocrystalline semiconductor material may be between the damage region and the dielectric material. The unit may be incorporated into an assembly with a handle component, and a chuck may be used to contort the assembly and thereby induce cleavage along the damage region.</p>
申请公布号 SG11201400657T(A) 申请公布日期 2014.06.27
申请号 SGT11201400657 申请日期 2012.09.07
申请人 MICRON TECHNOLOGY, INC. 发明人 QIN, SHU;ZHANG, MING
分类号 H01L27/12;H01L21/20 主分类号 H01L27/12
代理机构 代理人
主权项
地址