发明名称 DEVICE FOR PROTECTING INSPECTION WINDOW OF VACUUM CHAMBER
摘要 FIELD: physics.SUBSTANCE: device for protecting the inspection window of a vacuum chamber has a belt stretched along the window by driving and driven rollers. A thin elastic metal belt is made wider and 2.5 times longer than the window. The belt is laid and fastened in the groove of each roller. A rectangular frame with removable glass whose width is three times shorter than its length is inserted into the belt on its width. Grooves are made on the edges of each roller, with two cables not shorter than the length of the window and made in form of a spring being fastened in said grooves and stretched between the rollers below the belt. A support for the frame is placed near each roller. When the frame rests on the support near the driven roller, the cables are wound on the driving roller and the belt is wound on the driven roller. When the frame rests on the support near the driving roller, the cables are wound on the driven roller and the belt is wound on the driving roller. At least two guides are mounted on each side of the belt.EFFECT: protecting an elongated inspection window of a vacuum chamber from dust during visual monitoring of thermal evaporation processes.1 dwg, 1 ex
申请公布号 RU2521174(C1) 申请公布日期 2014.06.27
申请号 RU20130106354 申请日期 2013.02.13
申请人 FEDERAL'NOE GOSUDARSTVENNOE UNITARNOE PREDPRIJATIE "NAUCHNO-PROIZVODSTVENNOE PREDPRIJATIE "ISTOK" (FGUP "NPP "ISTOK") 发明人 ISAEV ALEKSEJ ALEKSEEVICH
分类号 C23C14/52 主分类号 C23C14/52
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