发明名称 BOTTOM LAYER FILM-FORMATION COMPOSITION OF SELF-ORGANIZING FILM CONTAINING POLYCYCLIC ORGANIC VINYL COMPOUND
摘要 [Problem] To provide a bottom layer film of a self-organizing film that forms a vertical pattern in the self-organizing film without causing intermixing (layer mixing) with a top-layer self-organizing film. [Solution] This bottom layer film-formation composition of a self-organizing film is characterized by containing a polymer having at least 0.2 mol% of a unit structure of a polycyclic aromatic vinyl compound with respect to all the unit structures of the polymer. The polymer has at least 20 mol% of a unit structure of an aromatic vinyl compound with respect to all the unit structures of the polymer, and has at least 1 mol% of a unit structure of a polycyclic aromatic vinyl compound with respect to all of the unit structures of aromatic vinyl compound. The aromatic vinyl compound contains vinylnaphthylene, acenaphthylene, or vinylcarbazole, which each may be substituted, and the polycyclic aromatic vinyl compound is vinylnaphthlylene, acenaphthylene, or vinylcarbazole. Also, the aromatic vinyl compound contains vinylnaphthylene, acenaphthylene, or vinylcarbazole, which each may be substituted, and an optionally substituted styrene, and the polycyclic aromatic vinyl compound is vinylnaphthlylene, acenaphthylene, or vinylcarbazole.
申请公布号 WO2014097993(A1) 申请公布日期 2014.06.26
申请号 WO2013JP83492 申请日期 2013.12.13
申请人 NISSAN CHEMICAL INDUSTRIES, LTD. 发明人 SOMEYA, YASUNOBU;WAKAYAMA, HIROYUKI;ENDO, TAKAFUMI;SAKAMOTO, RIKIMARU
分类号 C09D201/00;B05D1/38;B05D3/10;B05D7/24;C09D5/00;C09D125/00;C09D139/04;C09D145/00;G03F7/11;G03F7/26;H01L21/027 主分类号 C09D201/00
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