| 发明名称 |
LASER PROCESSING APPARATUS |
| 摘要 |
A laser processing apparatus includes: a laser generator that generates a laser beam, a diffractive optical element that divides the laser beam generated by the laser generator into a plurality of sub-laser beams, and a beam gap adjustor that adjusts a gap between neighboring ones of the plurality of sub-laser beams. Therefore, by installing a diffractive optical element that divides a laser beam that is generated by the laser generator into the plurality of sub-laser beams and a beam gap adjustor to adjust a gap between a plurality of sub-laser beams, the laser processing apparatus can form a processing pattern of various resolutions in a shadow mask while improving a processing speed of the shadow mask. |
| 申请公布号 |
US2014177055(A1) |
申请公布日期 |
2014.06.26 |
| 申请号 |
US201314085280 |
申请日期 |
2013.11.20 |
| 申请人 |
Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e. V. ;Samsung Display Co., Ltd. |
发明人 |
LEE Doh-Hyoung;LEE Choong-Ho;YUN Sung-Sik;PARK Tong-Jin |
| 分类号 |
H01S3/10 |
主分类号 |
H01S3/10 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A laser processing apparatus, comprising:
a laser generator that generates a laser beam; a diffractive optical element (DOE) that divides the laser beam that is generated by the laser generator into a plurality of sub-laser beams; and a beam gap adjustor that adjusts a gap between neighboring ones of the plurality of sub-laser beams. |
| 地址 |
Munchen DE |
