SELECTIVE EXFOLIATING AND TRANSFERRING APPARATUS AND METHOD FOR THIN FILM DEVICE

摘要

The present invention relates to an apparatus for selective exfoliation and transfer and a method thereof. The present invention is to provide the apparatus for selective exfoliation and transfer and a method thereof capable of: selectively exfoliating a portion of high performance devices existing in a wafer substrate and transferring the same to a flexible substrate; exfoliating the entire high performance devices existing in the wafer substrate and transferring selectively a portion of the same to the flexible substrate; or exfoliating a portion of the high performance devices existing in the wafer substrate and transferring selectively a portion of the same to the flexible substrate.