METHOD FOR EXAMINING QUALITY OF METAL WIRE BONDING IN REAL TIME

摘要

Disclosed is a method for examining the quality of metal wire bonding in real time which performs wire bonding in an ultrasonic bonding scheme and tests the efficiency of a bonding operation to determine whether the quality of the bonding operation is excellent or bad. The method for examining the quality of metal wire bonding in real time includes the steps of: adhering a metal wire to a bonding pad by pressing a bonding part of the metal wire using a bonding tool; bonding the bonding part of the metal wire to the bonding pad by vibrating the bonding tool at an ultrasonic wave frequency band; detecting a section modification value of the bonding part bonded to the bonding pad; and determining that bonding quality is bad when the section modification value is less than a preset section modification reference value, and determining that the bonding quality is excellent when the section modification value is equal to or greater than the preset section modification reference value.