A semiconductor device includes a substrate, an insulating film provided on a surface of the substrate, and a sensing film formed of a conductive material deposited on top of the insulating film. The sensing film defines at least one conductive path between a first position and a second position on the insulating film. A first circuit connection is electrically connected to the sensing film at the first position on the insulating layer, and a second circuit connection is electrically connected to the sensing film at the second position. A control circuit is operatively connected to the first circuit connection and the second circuit connection for measuring an electrical resistance of the sensing film. The sensing film has a thickness that enables a resistivity of the sensing film to be altered predictably in a manner that is dependent on ambient moisture content.
申请公布号
WO2014099915(A1)
申请公布日期
2014.06.26
申请号
WO2013US75677
申请日期
2013.12.17
申请人
ROBERT BOSCH GMBH;FEYH, ANDO;GRAHAM, ANDREW;SAMARAO, ASHWIN;YAMA, GARY;O'BRIEN, GARY
发明人
FEYH, ANDO;GRAHAM, ANDREW;SAMARAO, ASHWIN;YAMA, GARY;O'BRIEN, GARY